MKS ENI RF 13.56 MHz - SERVICE

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SKU
SERVICE_MKSENIRF13.56
"

90 day warranty repair service and testing on most MKS ENI 13.56 MHz RF plasma power supplies.

ACG Series

  • ACG-3, ACG-3B, ACG-3XL
  • ACG-5, ACG-5J, ACG-5XL
  • ACG-6, ACG-6B, ACG-6M5
  • ACG-10, ACG-10-01, ACG-10B, ACG-10B-01, ACG-10B-02, ACG-10B-03, ACG-10B-07, ACG-10T, ACG-10XL

GHW Series

  • GHW-12A, GHW-12Z
  • GHW-25A, GHW-25Z, GHWE-25
  • GHW-50A, GHW-50Z-07126
  • GHW-55A
  • GHW-58A
  • GHW-85A

MW Series

  • MW-5, MW-5D, MW-5DM11, MW-5D-01A, MW-5D-01B, MW-5D-01M2, MW-5D-01M5, MW-5-21021
  • MW-10, MW-10D, MW-10T, MW-10-21191
  • MW-25D, MW-25D-02M1, MW-25D-02M3
  • MW-3513
  • MWD-25LD-02, MWD-25LD-06
  • MWD-55LD-01
  • MWH-5-01M1, MWH-5-01M2, MWH-5-01M3
  • MWH-25-04
  • MWH-100-1, MWH-100-01, MWH-100-01M6
  • MWM-25-02X

OEM Series

  • OEM-6, OEM-6A, OEM-6B, OEM-6M
  • OEM-650, OEM-650A, OEM-650A-XL
  • OEM-10, OEM-10B
  • OEM-12, OEM-12A, OEM-12A-XL
  • OEM-12B, OEM-12B-02, OEM-12B-07, OEM-12B3, OEM-12B3-02, OEM-12B3-07, OEM-12B3-08, OEM-12L
  • OEM-1250
  • OEM-25, OEM-25A, OEM-25B-01, OEM-25N, OEM-25N-11481, OEM-25N-XL, OEM-25XL
  • OEM-28B-02, OEM-28B-03, OEM-28B-04, OEM-28B-07, OEM-28B-08
  • OEM-50, OEM-50N-11601, OEM-50N-XL
  • OEM-2000

Plasmaloc Series

  • PL-1HF
  • PL-2HF, PL-2HF-11451, PL-2HF-11451-54, PL-2HF-11451-55
  • PL-2HFN-01, PL-2HFN-1
  • PL-3HF

RFC Series

  • RFC-5MW
  • RFC-6-01, RFC-6-02
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Questions? Please call our toll free number at 866-332-0500 or send an e-mail to our sales team!