Shimadzu TMP-303LMC - REBUILT

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SKU
REBUILT_TMP303LMC
Weight 35 lbs
Pumping Speed 320 l/s
Ultimate Pressure 1 x 10-7 Pa

Shimadzu TMP-303LMC Turbomolecular Vacuum Pump - REBUILT

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Turbo molecular pump TMP-303LM TMP-303LMC TMP-303M TMP-303MC
Inlet flange VG100 / ICF152 / ISO100B / ISO100C
Outlet flange KF25
Cooling method Water Cooling fan
Ultimate pressure (after baking)
(Note1)
10-8 Pa order 10-7 Pa order 10-8 Pa order 10-7 Pa order
Maximum allowable inlet pressure
(N2 continuous exhaust)
200 Pa 1.3 Pa
Maximum allowable outlet pressure 400 Pa 40 Pa
Pumping speed
(Note 2)
N2 320 l/s
He 340 l/s
H2 320 l/s
Compression ratio N2 1 x 109
He 8 x 104
H2 1 x 104
Rated speed 45000 rpm
Start-up time 5 minutes or less
Mounting position In any desired direction
Bake-out temperature at an inlet flange 120 degrees C. or less
Vibration level (by Shimadzu's method) 0.012 µm or less (0-peak)
Recommended flow rate of purge gas 20 to 30 mL/min (Note 3)
Recommended pumping speed of backing pump in case of gas purge 200 L/min or more
Environmental Temperatures 0 to 40 degrees C.
Admissible ambient
magnetic field
Radial direction 3 mT
Axial direction 15 mT
Water Flow rate 1 to 3 L/min -
Pressure 0.2 to 0.5 MPa
Temperature 5 to 30 degrees C.
Mass 14 kg

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Shimadzu TMP-303LMC Turbomolecular Vacuum Pump - REBUILT