EBARA EMT1300 Mag Lev - NEW
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| Weight | 92 lbs |
|---|---|
| Pumping Speed | 1,300 l/s |
| Ultimate Pressure | < 7.50 x 10-9 torr |
EBARA EMT1300 Magnetically Levitated Turbo Vacuum Pump - NEW
The EMT Series offers five major types of turbomolecular pumps - temperature-controlled, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum.
The EMT Series turbomolecular pumps features a wide pressure range with maximum back pressure up to 3 Torr.
The temperature controlled model turbomolecular pumps reduce the rate condensation of the byproduct and process effluent build up commonly found inside a turbomolecular pump. The patented thermal insulation structure with integrated temperature management system is the most energy efficient temperature controlled turbomolecular pump on the market today.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Inlet flange | ISO-B200 / CF200 |
| Outlet flange | NW40 |
| Volume flow rate | |
| N2 (l/s) | 1,300 |
| N2 w/ protective screen (l/s) | 1,230 |
| H2 (l/s) | 1,200 |
| Maximum compression ratio | |
| N2 | 1 x 108 |
| H2 | 1.5 x 104 |
| Ultimate pressure | < 7.5 x 10-9 Torr (< 1 x 10-6 Pa) |
| Allowable outlet pressure | 3.8 Torr (500 Pa) |
| Maximum throughput | |
| N2 (sccm) | 3,000 |
| N2 (Pa x l/s) | 5,520 |
| Ar (sccm) | 1,500 |
| Ar (Pa x l/s) | 2,760 |
| Revolution speed | 33,600 rpm |
| Startup time | 4 - 5 min |
| Shutdown time | 4 - 5 min |
| Installation position | Any |
| Vibration level (0 - peak) | < 0.005 μm |
| Pump bake out temperature | max 120°C |
| Bearing system | 5-axis magnetic bearing |
| Cooling system | Water/air |
| Cooling water flow rate | 1.5 l/min |
| Recommended backing pump | ≥ 250 l/min |
| N2 gas throughput for purging | 20 sccm (36.8 Pa-l/sec) |
| Weight | 75 / 92 lbs (34 / 42 kg) |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
EBARA EMT1300 Magnetically Levitated Turbomolecular Vacuum Pump - NEW
