EBARA ESR20N - REBUILT

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In stock
SKU
REBUILT_ESR20N
Weight 200 lbs
Pumping Speed 71 cfm
Ultimate Pressure 1.5 x 10-2 Torr

EBARA ESR20N Light Duty Dry Vacuum Pump - REBUILT

The ESR Series (Energy Saving Roots) are multistage dry vacuum pump engineered for application from clean to medium duty processes such as Load Lock, SEM, PVD, Ashing, Sputtering and Etch. The ESR Series covers a wide pumping speed range from 35 ~ 1,625 cfm with an ultimate pressure as low as 15 mTorr.

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Pumping speed 50/60 Hz 46 / 71 cfm
1,300 / 2,000 l/min
78 / 120 m3/hr
Ultimate pressure 50/60 Hz 15 mTorr
2 Pa
0.02 mBar
Gas inlet connection NW 40
Gas outlet connection NW 40
Power at ultimate pressure 0.55 - 0.70 kW
Maximum power 2.5 kW
Cooling water requirements, min. flow rate     2 l/min
Bearing and dilution N2, bearing seals 0 - 12 l/min
Cabinet dimensions, L x W x H 25 x 11 x 12.6 in
635 x 280 x 320 mm
Weight 200 lbs
90 kg

Specification Sheet

Type Label Description Download
EBARA ESR Series - REBUILT Instruction Manual Download

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EBARA ESR20N Light Duty Dry Vacuum Pump - REBUILT