EBARA EV-S100P - REBUILT
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SKU
REBUILT_EV-S100P
| Weight | 330.6 lbs |
|---|---|
| Pumping Speed | 10,000 L/min |
| Ultimate Pressure | 0.5 Pa |
EBARA EV-S100P Semiconductor Dry Vacuum Pump - REBUILT
Model EV-S is an industry-standard, robust-roots type dry vacuum technology designed ideally for a light to medium duty applications having ultra low power consumption. Model EV-S consists of various advanced technologies such as controllable pumping speed for broadband pumping capacity coverage, sleep & idle mode function and the most advanced inte rlock feature as well as optional anti-corrosion Niresist material.
- Small footprint, light weight and lower power consumption design to pumping capacity
- Various pump configurations according to process application (Model EV-S*P: with N2 purge, Model EV-SN: with Niresist material & N2 purge)
- DC motor drive provides a lower power consumption and identical pumping performance regardless a frequency (50/60Hz)
- Unique exhaust pumping design contributes pumping performance around atmospheric pressure
- Advanced warning & alarm data storage capability
- Hands on feature for warning setting (programmable from LCD controller)
- Advanced sensing function reduces product down time
- Semi-S2/CE marking/NRTL available
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Pumping speed | 10,000 |
| Ultimate pressure | 0.5 Pa |
| Gas inlet | NW80 |
| Gas outlet | NW40 |
| Approx. power at ultimate pressure (max. power) | 0.65 kW (4.6 kW) |
| Cooling water connection | Rc1/4 (coupler) |
| Cooling water pressure [guage press.] | Differential press.: min. 0.2 MPa Supply: max. 0.4 MPa |
| Cooling water flow rate | 2.0～3.0 L/min |
| Cooling water temperature | Max. 30℃ |
| N2 gas connection | 1/4” tube fitting (same as SWAGELOK) |
| N2 gas pressure [guage press.] | Supply: 0.15 - 0.7 MPa [Setting: 0.09 - 0.12 MPa] |
| N2 gas approx. flow rate [N2-0 mode] | 17～20 Pa m3/s [2.4 Pa m3/s] |
| Duct ventilation connection | φ50 mm |
| Duct ventilation pressure | -196 Pa |
| Duct ventilation approx. flow rate | 0.5 m3/min |
| Lubrication oil | BARRIERTA J100ES (NOK) 0.1L |
| Approx. weight | 120 kg |
| Power supply phase/volt/freq. | 3-phase, 380-440V±10% (50/60Hz±5%) |
| Power capacity | 6.4 kVA |
| Power supply connection | Japan aviation electronics industry JL04HV-2E22-22PE-B |
| Control signal | D-sub 15pin ＋ D-sub 25pin |
| Communication | RS-232C D-sub 9pin X 2 |
| Main fuse | 20A |
| SCCR | 10 kA |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
EBARA EV-S100P Semiconductor Dry Vacuum Pump - REBUILT
