EBARA EV-S30 - NEW

EBARA EV-S30 Semiconductor Dry Vacuum Pump - NEW

Dry vacuum pump with low power consumption and small footprint

With EBARA’s unique rotor design and idling function, the Model EV-S range achieves world-class energy efficiency and a small footprint. Helps to reduce running costs. With enhanced corrosion resistance options available, this model offers a wide range of applications from light-load processes such as load-lock and SEM to corrosive processes.

• Low power consumption
• Compact and light weight
• Corrosion resistant material options
• N2 purge model option available
• Identical pumping performance regardless of frequency (50/60 Hz)
• Oil-free
• CE marking/SEMI-S2/NRTL available

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!