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In stock
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Weight 20 lbs
Pumping Speed 42-61 l s-1
Ultimate Pressure 5 x 10-9 mbar

Edwards EXT75DX Compound Turbomolecular Vacuum Pump - REBUILT

The EXT75DX is a hybrid bearing compound turbo pump that combines the proven technology of a ceramic mechanical lower bearing, a dry permanent magnetic upper bearing and Holweck drag stage with the added convenience of an on-board 24V controller allowing parallel and serial communication compatible with our TAG and TIC controllers. It is available with either a DN 40 NW, ISO-63, DN 63 CF or an ISO-100 inlet flange with an N2 pumping speed of up to 66l/s. A basic pump system would require an EXT75DX pump, a TAG or TIC controller, either an air or water cooling accessory and a suitable backing pump.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inlet flange DN 63 ISO-K / DN 63 CF / DN 40 NW / DN 100 ISO-K
Pumping Speed
N2 ISO-63 / 63 CF (DN 40 NW) (ISO-100) 61 l/s (42 l/s) (66 l/s)
He ISO-63 / 63 CF (DN 40 NW) (ISO-100) 57 l/s (49 l/s) (59 l/s)
H2 ISO-63 / 63 CF (DN 40 NW) (ISO-100) 53 l/s (48 l/s) (54 l/s)
Compression ratio
N2 > 1 × 1011
He 1 x 106
H2 5 x 104
Ultimate Pressure (mbar)
w/ RV backing pump ISO / CF < 5 x 10-9 / 5 x 10-10
w/ diaphragm backing pump ISO/CF < 5 x 10-8 / 5 x 10-9
Outlet flange DN 16 NW
Recommended backing pump* RV5 / nXDS6i
Vent port 1/8 inch BSP
Purge port 1/8 inch BSP
Max continuous inlet pressure (light gas pumping)
Water cooling (water at 15°C, ambient temp at 40°C) 2 × 10-2 mbar
Forced air cooled, 35°C ambient 1 × 10-2 mbar
Pump rotational speed
Nominal rotational speed 90,000 rpm
Standby rotational speed Variable from 49,500 to 90,000 rpm
(63,000 rpm default)
Programmable power limit settings Variable from 50-120W (80W default)
Start time to 90% speed 110 s ‡
Analogue outputs Rotational speed;
Power consumption; Pump temp; Controller temp
Cooling method# Forced air / water
Ambient air temperature for forced air cooling 5 - 35°C
Min cooling water flow rate (water 15°C) 15 l h-1
Water temp range 10 - 20°C
Max inlet flange temp 100°C
Operating attitude Vertical and upright, through to
Noise level at 1 metre < 50 dB(A)
Max magnetic field pump can tolerate 5 mT
Recommended controller TIC 100 turbo and instrument controller
Quiescent electrical power 10 W

* A smaller backing pump may be used depending on application. A suitable diaphragm pump with ultimate <5 mbar may also be used e.g. XDD1.
† Above this inlet pressure

Type Label Description Download
BOC Edwards EXT Series - REBUILT User's Manual Download

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.

Edwards MODEL: EXT75DX Compound Turbomolecular Vacuum Pump - REBUILT
CODE: B722-35-000 / B72235000  EXT75DX  DN 40 NW
CODE: B722-41-000 / B72241000  EXT75DX  DN 63 ISO-K
CODE: B722-45-000 / B72245000  EXT75DX  DN 100 ISO-K
      B722-37-000 / B72237000  EXT75DX  DN 63 ISO-K
      B722-42-000 / B72242000  EXT75DX  DN 63 CF
      B722-46-000 / B72246000  EXT75DX  DN 100 ISO-K (DN 25 NW Backing)
      B722-43-000 / B72243000  EXT75DX  DN 40 NW
      B722-48-000 / B72248000  EXT75DX  ISO-63

Let us know if you just need the power supply.
      D396-47-000 / D39647000