Edwards STP-XA3203CV - REBUILT
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| Weight | 176 lbs |
|---|---|
| Pumping Speed | 3200 l/s |
| Ultimate Pressure | 1 x 10-7 Pa |
Edwards STP-XA3203CV Turbomolecular Vacuum Pump - REBUILT
An STP pump can be installed in any orientation and operate by remote control. If any rotor imbalance occurs (by deposition of process by-products, for example) sensors detect changes in its motion and compensate the magnetic fields accordingly. There are backup precision mechanical bearings to protect the pump in the event of a total disruption of magnetic suspension or a sudden massive air inrush that overcomes the magnetic bearing stiffness.
Model names ending in a C are corrosion-resistant, with nickel-coated rotors and stators and a nitrogen purge port. Ones with a prefix of H or A are high throughput pumps incorporating a hybrid pumping mechanism for higher gas flow. These are optimized for processes such as plasma etch. We also offer repair service.
TMS system
The Edwards Temperature Management System is available on a wide range of turbo pumps. It is designed to optimize the temperature within the pump, dramatically reducing the particle condensation within. This will not only considerably enhance the performance of the pump under harsh process conditions, but also increase its operational life.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Inlet flange | ISO-320F | |
| Pumping speed | ||
| N2 | 3,200 l/s | |
| H2 | 2,300 l/s | |
| Compression ratio | ||
| N2 | > 108 | |
| H2 | > 6 x 103 | |
| Ultimate pressure | 10-7 Pa | |
| Max. allowable backing pressure | 266 Pa | |
| Max. allowable gas flow | ||
| N2 (water cooled) | 2,300 sccm | 3.8 Pam3s-1 |
| Ar (water cooled) | 1,900 sccm | 3.2 Pam3s-1 |
| Rated speed | 27,500 rpm | |
| Starting time | < 8 min | |
| Mounting position | Any | |
| Water cooling | ||
| Flow | 3 l/min-1 | |
| Pressure | 0.3 MPa | |
| Temperature | 5 - 25°C | |
| Recommended purge gas flow | 50 sccm | |
| Power consumption | 1.5 kVA | |
| Input voltage | 200 to 240 VAC | |
| Pump weight | 80 kg |
| Type | Label | Description | Download |
|---|---|---|---|
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Edwards STP Series | Instruction Manual | Download |
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Edwards STP-XA2703 & XA3203 - REBUILT | Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards STP-XA3203CV Turbomolecular Vacuum Pump - REBUILT P/N PT66-16-020 / PT6616020 STP-XA3203CV M0J3690 ISO-320F KF-40 P/N PT66-0Z-050 / PT660Z050 STP-XA3203C M0B1620
