Edwards STPA1303C - NEW

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In stock
SKU
NEW_STPA1303C
Weight 85 lbs
Pumping Speed 1,300 l/s
Ultimate Pressure 1 x 10-9 Torr

Edwards STPA1303C Turbomolecular Vacuum Pump - NEW

Edwards STPA1303C is a turbomolecular pump designed for use in semiconductor applications. Edwards advanced rotor technology gives class-leading performance for maximum process flexibility. The STPA1303C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Advanced Rotor Technology

  • Higher gas throughput
  • Maximized process flexibility
  • Oil free
  • Low vibration
  • High reliability
  • Maintenance free
  • Harsh process compatible
  • Increased life

Advanced Controller Design

  • Auto tuning
  • Self diagnostic functions
  • DC motor drive
  • Battery-free operation

Compact Design

  • Small footprint
  • Half rack controller

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inlet flange ISO-200F
Outlet port KF-40
Purge port KF-10
Water cooling fitting PT1/4
Pumping speed
    N2 1,300 l/s
    H2 800 l/s
Compression ratio
    N2 > 108
    H2 103
Ultimate pressure w/ bake out heating     10-7 Pa (10-9 Torr)
Max. continuous outlet pressure 270 Pa (2 Torr)
Max. nitrogen throughput 1,500 sccm
Rated speed 35,500 rpm
Starting time 7 min
Max inlet flange temperature 120°C
Input voltage 200 to 240
Power consumption 0.85 kVA
Weight 39 kg
Type Label Description Download
Edwards STP Series Instruction Manual Download

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.

Edwards STPA1303C Turbomolecular Vacuum Pump - NEW

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