VAT 02110-AE24 46x236 - REBUILT

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SKU
REBUILT_02110-AE24

VAT 02110-AE24 46x236 Wafer Vacuum Transfer Valve

For load lock / process module isolation. For 200mm, 300mm and 450mm semiconductor applications.

VAT Part Numbering System

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VAT Fabrication No. 02110-AE24 46x236 Wafer Vacuum Transfer Valve