Edwards iH1000 - REBUILT
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| Weight | 948 lbs |
|---|---|
| Pumping Speed | 950 m3/h |
| Ultimate Pressure | 3 x 10-2 mbar |
Edwards iH1000 Semiconductor Dry Vacuum Pump - REBUILT
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Peak speed | 950 m3h-1 |
| 560 cfm | |
| 16,670 l/min-1 | |
| Ultimate vacuum | 2 x 10-3 mbar |
| 2 x 10-1 Pa | |
| Typical shaft seal nitrogen flow | 4 slm |
| Inlet connection | ISO100 |
| Outlet connection | NW40 |
| Typical cooling water flow at 15 psi pressure drop | 240 l/h-1 |
| 4 l/min-1 | |
| Weight | 430 kg |
| Power input at ultimate | 3.8 kW |
| Rated motor power | 6.1 kW |
| Oil capacity | 1.48 l |
All figures are typical without gas ballast.
| Type | Label | Description | Download |
|---|---|---|---|
|
BOC Edwards iH Series - REBUILT | Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
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